JPH0347550B2 - - Google Patents

Info

Publication number
JPH0347550B2
JPH0347550B2 JP58163175A JP16317583A JPH0347550B2 JP H0347550 B2 JPH0347550 B2 JP H0347550B2 JP 58163175 A JP58163175 A JP 58163175A JP 16317583 A JP16317583 A JP 16317583A JP H0347550 B2 JPH0347550 B2 JP H0347550B2
Authority
JP
Japan
Prior art keywords
pattern
recognition
substrate
mark
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58163175A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6055480A (ja
Inventor
Masao Ikehata
Yasuo Iguchi
Yoshiro Takahashi
Isao Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP58163175A priority Critical patent/JPS6055480A/ja
Publication of JPS6055480A publication Critical patent/JPS6055480A/ja
Publication of JPH0347550B2 publication Critical patent/JPH0347550B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Image Processing (AREA)
  • Wire Bonding (AREA)
  • Die Bonding (AREA)
  • Image Analysis (AREA)
  • Image Input (AREA)
JP58163175A 1983-09-07 1983-09-07 パタ−ン位置認識方法 Granted JPS6055480A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58163175A JPS6055480A (ja) 1983-09-07 1983-09-07 パタ−ン位置認識方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58163175A JPS6055480A (ja) 1983-09-07 1983-09-07 パタ−ン位置認識方法

Publications (2)

Publication Number Publication Date
JPS6055480A JPS6055480A (ja) 1985-03-30
JPH0347550B2 true JPH0347550B2 (en]) 1991-07-19

Family

ID=15768666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58163175A Granted JPS6055480A (ja) 1983-09-07 1983-09-07 パタ−ン位置認識方法

Country Status (1)

Country Link
JP (1) JPS6055480A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2852380B2 (ja) * 1988-03-26 1999-02-03 株式会社半導体エネルギー研究所 炭素または炭素を主成分とする被膜を形成する方法
JPH01276730A (ja) * 1988-04-28 1989-11-07 Matsushita Electric Ind Co Ltd 基板認識方法及びその装置
US5094878A (en) * 1989-06-21 1992-03-10 Nippon Soken, Inc. Process for forming diamond film

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56155802A (en) * 1980-05-06 1981-12-02 Fujitsu Ltd Recognition device

Also Published As

Publication number Publication date
JPS6055480A (ja) 1985-03-30

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